High Mag Large Format Telecentric Lens for Semiconductor
Through continuous upgrading and improvement, the measurement accuracy has
reached the micrometer level.
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High Mag Large Format Telecentric Lens for Semiconductor
Specification
| Model | Coaxial | Mag (X) |
WD
(mm) |
Image FOV
(mm) |
Telecentricity (°) |
DOF (mm) |
Aperature | Resolution (μm) |
Image MTF30 (LP/mm) |
Distortion (%) |
Mount | Weight (kg) |
O/I
(mm) |
| XF-MDT1X135-D38-VI-M58-11.48 | No | 1 | 135 | 38 | 0.150 | 0.74-10.0 | F6.6-91.6 | 4.3-60.4 | 155-9.6 | 0.020% | M58 | 1.6 | 395 |
| XF-MDT1X135DZM-D38-VI-M58-11.48 | Yes | 1 | 135 | 38 | 0.150 | 0.74-10.0 | F6.6-91.6 | 4.3-60.4 | 155-9.6 | 0.020% | M58 | 1.9 | 395 |
| XF-MDT1.5X110-D38-VI-M58-11.48 | No | 1.5 | 110 | 38 | 0.150 | 0.33-5.6 | F6.7-112.2 | 2.9-49.3 | 150-9.4 | 0.021% | M58 | 1.4 | 370 |
| XF-MDT1.5X110DZMC-D38-VI-M58-11.48 | Yes | 1.5 | 110 | 38 | 0.150 | 0.33-5.6 | F6.7-112.2 | 2.9-49.3 | 150-9.4 | 0.021% | M58 | 1.6 | 370 |
| XF-MDT2X110-D41-VI-M58-11.48 | No | 2 | 110 | 41 | 0.160 | 0.28-5.1 | F10.0-F179.5 | 3.3-59.2 | 100-5.8 | 0.050% | M58 | 1.5 | 392 |
| XF-MDT2X110DZM-D41-VI-M58-11.48 | Yes | 2 | 110 | 41 | 0.160 | 0.28-5.1 | F10.0-F179.5 | 3.3-59.2 | 100-5.8 | 0.050% | M58 | 1.6 | 392 |
| XF-MDT3X110-D41-VI-M58-11.48 | No | 3 | 110 | 41 | 0.153 | 0.15-3.1 | F12.4-F248.1 | 2.8-54.6 | 80-4.2 | 0.059% | M58 | 1.6 | 416 |
| XF-MDT3X110DZM-D41-VI-M58-11.48 | Yes | 3 | 110 | 41 | 0.153 | 0.15-3.1 | F12.4-F248.1 | 2.8-54.6 | 80-4.2 | 0.059% | M58 | 1.7 | 416 |
| XF-MDT4X110-D41-VI-M58-11.48 | No | 4 | 110 | 41 | 0.116 | 0.11-2.3 | F16.5-F330.8 | 2.8-54.6 | 60-3.1 | 0.052% | M58 | 1.5 | 450 |
| XF-MDT4X110DZM-D41-VI-M58-11.48 | Yes | 4 | 110 | 41 | 0.116 | 0.11-2.3 | F16.5-F330.8 | 2.8-54.6 | 60-3.1 | 0.052% | M58 | 1.7 | 450 |
| XF-10MDT2X65-1C-VI | No | 2 | 65 | 17.6 | 0.205 | 0.20-2.8 | F7.1-98.9 | 2.4-32.6 | 135-10.5 | 0.100% | C | 0.5 | 233 |
| XF-10MDT2X65D-1C-VI | Yes | 2 | 65 | 17.6 | 0.205 | 0.20-2.8 | F7.1-98.9 | 2.4-32.6 | 135-10.5 | 0.100% | C | 0.5 | 233 |
| XF-10MDT2X65DZM-1C-VI | Yes | 2 | 65 | 17.6 | 0.205 | 0.20-2.8 | F7.1-98.9 | 2.4-32.6 | 135-10.5 | 0.100% | C | 0.6 | 233 |
| XF-10MDT3X65-1C-VI | No | 3 | 65 | 17.6 | 0.212 | 0.12-1.8 | F9.5-147.3 | 2.1-32.3 | 105-7 | 0.085% | C | 0.5 | 241 |
| XF-10MDT3X65D-1C-VI | Yes | 3 | 65 | 17.6 | 0.212 | 0.12-1.8 | F9.5-147.3 | 2.1-32.3 | 105-7 | 0.085% | C | 0.5 | 241 |
| XF-10MDT3X65DZM-1C-VI | Yes | 3 | 65 | 17.6 | 0.212 | 0.12-1.8 | F9.5-147.3 | 2.1-32.3 | 105-7 | 0.085% | C | 0.6 | 241 |
| XF-10MDT4X65-1C-VI | No | 4 | 65 | 17.6 | 0.161 | 0.08-1.4 | F11.8-194.9 | 2.0-32.3 | 85-5 | 0.090% | C | 0.5 | 257 |
| XF-10MDT4X65D-1C-VI | Yes | 4 | 65 | 17.6 | 0.161 | 0.08-1.4 | F11.8-194.9 | 2.0-32.3 | 85-5 | 0.090% | C | 0.6 | 257 |
| XF-10MDT4X65DZM-1C-VI | Yes | 4 | 65 | 17.6 | 0.161 | 0.08-1.4 | F11.8-194.9 | 2.0-32.3 | 85-5 | 0.090% | C | 0.6 | 257 |
| XF-10MDT2X110-1.1C-VI | No | 2 | 110 | 17.6 | 0.100 | 0.25-3.6 | F9-F126.8 | 3.0-41.8 | 110-8.2 | 0.047% | C | 0.6 | 302 |
| XF-10MDT2X110DZM-1.1C-VI | Yes | 2 | 110 | 17.6 | 0.100 | 0.25-3.6 | F9-F126.8 | 3.0-41.8 | 110-8.2 | 0.047% | C | 0.7 | 302 |
| XF-10MDT3X110-1.1C-VI | No | 3 | 110 | 17.6 | 0.070 | 0.14-2.4 | F12.4-F190.0 | 2.8-41.8 | 80-4.6 | 0.048% | C | 0.7 | 328 |
| XF-10MDT3X110DZM-1.1C-VI | Yes | 3 | 110 | 17.6 | 0.070 | 0.14-2.4 | F12.4-F190.0 | 2.8-41.8 | 80-4.6 | 0.048% | C | 0.7 | 328 |
| XF-10MDT4X110-1.1C-VI | No | 4 | 110 | 17.6 | 0.050 | 0.10-1.8 | F15.2-F253.4 | 2.5-41.8 | 65-4.1 | 0.046% | C | 0.7 | 348 |
| XF-10MDT4X110DZM-1.1C-VI | Yes | 4 | 110 | 17.6 | 0.050 | 0.10-1.8 | F15.2-F253.4 | 2.5-41.8 | 65-4.1 | 0.046% | C | 0.8 | 348 |
Remarks:
To ensure the illumination consistency and performance of the coxial lights, the spot light has
to meet below requirements:
1. Consistent & Efficient lighting area ≥φ6mm
2. Consistent & Efficient lighting angle ≥±13°(NA is about 0.22)
